Extrion (Varian) 400 Ion Implanter

This accelerator was manufactured by Extrion corporation, now a part of Varian, Inc. It was obtained in 1989 by a generous donation from General Electric.

The original implant end-station was replaced by one designed within this laboratory. That end-station can handle sample sizes from millimeters to eight inches in diameter.

This system is capable of implanting a wide range of ions at energies from 50 to 400 keV.