Contact the Office of Media Relations at (518) 956-8150

Gregory  Denbeaux

Assistant Professor
College of Nanoscale Science and Engineering
Department: Nanoengineering

Lithography; extreme ultraviolet (EUV) lithography; optics contamination; mass spectrometry; plasma light source; microscopy; x-ray microscopy; magnetic materials

Campus phone: (518) 527-7987
Campus email:

Assistant Professor Gregory Denbeaux's research focuses on high-resolution microscopy for lithography and magnetic materials, as well as high-resolution optical techniques. His research on magnetic materials focuses on nanometer-scale magnetism and magnetic recording. Denbeaux, who also serves as a staff scientist at the Center for X-Ray Optics at Lawrence Berkeley National Laboratory, received his bachelor's degree in physics from Wesleyan University and master's and doctorate from Duke University.