Ruud van den Boom

Advisor
Professor Kathy Dunn


Research group
Metrology


Research group WEBSITE
http://cnse.albany.edu/facilities/metrology.html


Current Projects
Copper Grain Growth in Narrow Lines and Vias


Publications
-K.A. Dunn, R. van den Boom, E. Lifshin, Examining the Microstructure and Impurity Distribution of Narrow Lines and Vias, Microscopy & Microanalysis Conference platform session.
- R. van den Boom, E. Lifshin, K.A. Dunn, Examining the Microstructure and Impurity Distribution of Narrow Lines and Vias, Microscopy & Microanalysis 13(Suppl. 2), 818CD (2007).
- R. van den Boom, E. Lifshin and K.A. Dunn, Evolution of Grain Size and Crystallographic Orientation in Narrow Lines, to appear in Proc. of the Advanced Metallization Conference, 2007.
- R.J.J. van den Boom, J. Rullan, E. Lifshin and  K. A. Dunn, Influence of Trench Width on the Microstructural Evolution of Copper Electroplated in Narrow Features, to be presented at the Fall Meeting of the Materials Research Society.
- G.D. Dilliway, R. van den Boom, B. van Daele, F.E. Leys, T. Clarysse, B. Parmentier, A. Moussa, C. Defranoux, A. Benedetti, O. Richard, H. Bender, E. Simoen, M. Meuris (2006) In-situ Phosphorus Doping of Germanium by APCVD ECS Transactions, 3 (7) 599-609
 

Undergraduate School
Fontys University of Applied Sciences, Eindhoven Netherlands


Extracurricular Activities
Nano-Graduate Student Organization: Treasurer and Event Coordinator

CDMMS: Full member of the Capital District Microscopy and Microanalysis Society