Channeling (PIXE and RBS)
Single-crystal materials such as are used in semiconductor manufacture have orderly arrays of atoms. If a particle beam arrives in alignment with the atomic structure, most of the particle beam will pass through the space between the planes of atoms and will penetrate deep within the crystal. Channeling studies take advantage of this phenomenon to find the structure of the crystal and to locate the placement of atoms within the array.
Channeling measurements can use ion scattering (RBS) as well as X-ray production (PIXE). Both are available simultaneously on the normal RBS-PIXE beamline. A standard goniometer is used to hold and align the sample to the ion beam.