IBL Facility Overview

The Ion Beam Laboratory is dedicated to research, education and public service using ion accelerators.

Education | Public Service


Materials Analysis and High Energy Ion Implant
4 Megavolt Dynamitron

Dynamitron Accelerator open Dynamitron Control Console Ultra High Vacuum Chamber
Large Area Implant Holder High Resolution RBS spectrometer

Medium energy implantation
400 Kilovolt Varian (Extrion) 400-10A Implanter

Extrion Large Area Implant Holder Implant holder is discolored by ion implantation Extrion Implanter Console

IBL Auxiliary Tools

Thin-film evaporation
I-V and C-V instrumentation
Low temperature cryostat
Furnaces
SEM
SIMS
Optical microscopy
Alpha-Step profiler