Growth Techniques

  • Veeco D180 MOCVD Reactor
  • Veeco D75 MOCVD Reactor

Characterization Techniques

  • k-Space kSA ICE system for in-situ stress, temperature, and reflectance monitering
  • PL (LT and RT) set up with excitation sources of 325nm (He-Cd) and 225nm (He-Ag, pulsed) with an Oriel monochrometer 200-5000nm
  • Closed cycle cryostat, temperature range from 7K to RT
  • Computer controlled home-made Electroluminscence measurement system
  • Computer controlled home-made Internal Photoemission Characterization system
  • Keithley 6430 sub-femto amp remote sourcemeter (IV)
  • Newport Xenon 50-500W Xenon Lamp source
  • Accent Hall Measurement setup
  • Ocean Optics thickness measurement
  • JEOL 200 CX Transmission Electron Microscope (TEM)
  • LEO 1550 Scanning Electron Microscope (SEM)
  • FEI Focused Ion Beam System (FIB)
  • Bruker D8 ADVANCE X-ray Diffractometer (XRD)
  • Veeco Dimension 3100 Atomic Force Microscope (AFM)
  • Linear Accelerator

Lithography and Processing Tools:

  • EVG640 Contact Aligner
  • E-Beam Evaporator
  • RTA and Lateral Oxidation Furnace
  • Spin coater, plasma asher and other supporting tools

Our group also has access to the fully-integrated research, development,prototyping and metrology tools of the CNSE Nanotech complex.